Electron heating in radio-frequency capacitively coupled atmospheric-pressure plasmas
نویسندگان
چکیده
منابع مشابه
Electron kinetics in radio-frequency atmospheric-pressure microplasmas.
The kinetic study of three radio-frequency atmospheric-pressure helium microdischarges indicates that the electron energy probability function is far from equilibrium, and three electron groups with three distinct temperatures are identified. The relative population of electrons in different energy regions is strongly time modulated and differs significantly from values recently reported from f...
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ژورنال
عنوان ژورنال: Applied Physics Letters
سال: 2008
ISSN: 0003-6951,1077-3118
DOI: 10.1063/1.3058686